Semiconductor Wafer MI Cable Pedestal Heater Precision Engineered

Precision Engineered Semiconductor Wafer Mineral Insulated Cable Pedestal Heater is designed and manufactured based on the clients' complete requirement. It is suitable for custom-engineered high-uniformity pedestals for a variety of processes, including CMP, photolithography, ash/strip, deposition, ion implant, and so on.

 

A cast-in MI cable heater offers several advantaged properties against conventional technologies and products.

 

With the cast-in design, heating elements intimately contact with the metal substrate, delivering uniform heat transfer and possessing longer service life, for lowered manufacturing and maintenance costs.

 

The semiconductor equipment manufacturers may work with MICH for

 

Complete Controlled manufacturing process: traceability on records, trusted subcontractor assessment, internal and external audits, regulatory compliance etc.
Integrated project management team for key projects
Strong R&D capability for innovations

Advanced designing and manfuacturing capacity for various options and complete supply range. 

 

Properties

 

1. The electric heating rod uses the mineral insulation (MI) heating cable developed by MICH as the heating element.

2. The electric heating rod has a solid structure, high flexural strength, compactness, sealing and explosion-proof, and meets the requirements for heating and heat tracing of various types of storage tanks for petroleum and its products with an explosion-proof grade dIIB T1~T6.

3. The electric heating rod heats uniformly, low surface heat load, reliable operation and long service life, no reactive power loss, high thermal efficiency, easy operation and maintenance and no daily maintenance required.

4. The electric heating rod has good corrosion resistance to crude oil and its finished products.

 

Specifications, models and working environment requirements

 

 

Model and specification sheet

 

Table 1 Model and Specification of Straight Tank Electric Heating Rod

No.	Model	Nominal power (Kw)	Rated voltage (V)	Operating current (A)	Number of power phases	Rod Outer diameter × length (mm)	Insertion length (mm)	Mounting short section size (mm)	Total weight (kg)
1	DRB-3/220/1600	3	220	13.6	1	Ф127×1600	1300	Ф159×5	52
2	DRB-5/220/2200	5	220	22.5	1	Ф127×2200	1900	Ф159×5	65
3	DRB-8/220/2800	8	220	36.4	1	Ф127×2800	2500	Ф159×5	95
4	DRB-9/3/660/3600	9	660	13.6	3	Ф127×3600	3300	Ф159×5	102
5	DRB-12/3/660/5000	12	660	18.2	3	Ф127×5000	4700	Ф159×5	112
6	DRB-15/3/660/5600	15	660	22.7	3	Ф127×5600	5300	Ф159×5	142
7	DRB-24/3/660/6400	24	660	36.4	3	Ф127×6400	6100	Ф159×5	170
8	DRB-3/3/380/1300	3	380	4.5	3	Ф127×1300	1000	Ф159×5	65
9	DRB-5/3/380/2200	5	380	7.5	3	Ф127×2200	1900	Ф159×5	80
10	DRB-9/3/380/3400	9	380	13.6	3	Ф127×3400	3400	Ф159×5	110
11	DRB-12/3/380/5036	12	380	18.2	3	Ф127×5036	4565	Ф159×5	98
12	DRB-15/3/380/5600	15	380	22.7	3	Ф127×5600	5300	Ф159×5	142
13	DRB-24/3/380/6400	24	380	36.4	3	Ф127×6400	6100	Ф159×5	170

 

Table 2 Model and Specification of Right Angle Tank Electric Heating Rod

 

No.	Model	Nominal power (Kw)	Rated voltage (V)	Operating current (A)	Number of power phases	Rod Outer diameter × length (mm)	Immersion length (mm)	Total weight (kg)
1	DRB-3/220/1600/L	3	220	13.6	1	Ф127×1600	1600	57
2	DRB-5/220/2200/L	5	220	22.5	1	Ф127×2200	2200	70
3	DRB-8/220/2800/L	8	220	36.4	1	Ф127×2800	2800	100
4	DRB-9/3/660/3600/L	9	660	13.6	3	Ф127×3600	3600	107
5	DRB-12/3/660/5000/L	12	660	18.2	3	Ф127×5000	5000	117
6	DRB-15/3/660/5600	15	660	22.7	3	Ф127×5600	5600	147
7	DRB-2/3/380/1100/L	2	380	3.0	3	Ф127×1100	1100	60
8	DRB-3/3/380/1300/L	3	380	4.5	3	Ф127×1300	1300	70
9	DRB-5/3/380/1900/L	5	380	7.5	3	Ф127×1900	1900	90
10	DRB-9/3/380/3400/L	9	380	13.6	3	Ф127×3400	3400	115
11	DRB-12/3/380/5000/L	12	380	18.2	3	Ф127×5000	5000	109
12	DRB-15/3/380/5600/L	15	380	22.7	3	Ф127×5600	5600	147

Note: The specifications above are regular ones with other specifications customizable according to user’s requirements, and the installation nipple joint is suppliable with the product.

 

3. Working environment requirements:

3.1 Ambient temperature: -30 ° C ~ +40 ° C

3.2 Voltage fluctuations are: -10% to +5%

3.3 Altitude: not required

3.4 Relative humidity of the environment: less than 95%

4, working principle and structure

1. working principle

The electric heating rod adopts a mineral insulated (MI) heating cable as heating element. The inner cavity of the rod can rapidly conduct heat that are fully transmitted to the rod body and released to the medium through the outer surface of the rod, and the electric energy is all converted into heat energy with a high heat transfer efficiency.

 

 

Figure 1: Schematic diagram of Straight Tank Electric Heating Rod Structure

 

 

1 Rod Casing 2 Core Tube 3 Mineral Insulated Heating Cable 4. Over-temperature Protective Sensor 5. Junction Box 6. Installation Nipple Joint

 

Figure 2: Schematic diagram of DRB--L (right angle) electric heating rod

 

 

1 Mineral Insulated Heating Cable 2 Outer Casing 3 Core Tube 4 Over Temperature Protection Sensor 5 Junction Box

 

 

Note: DRB--L type is a special structure of DRB type electric heating rod, which is specially designed for small oil tanks already in use. It can be installed in tank man hole without cleaning the inside or re-opening a new hole. The heating part is in the lower horizontal section while the vertical part is only the lead-out line section. The joint flange is arranged at the upper end of the vertical section, and the electrical wiring can be adjusted in a suitable direction and position.